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The machine that has given China a "brainache" for 6 years but still cannot copy it

China has yet to copy ASML's photolithography machine, which is considered the "heart" of modern chip manufacturing.

Báo Khoa học và Đời sốngBáo Khoa học và Đời sống03/11/2025

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A Chinese company recently reportedly failed in its attempt to reassemble an ASML DUV lithography machine after it disassembled it for reverse engineering purposes.
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The source revealed that ASML had to send technicians to assist and discovered that the equipment was severely damaged due to incorrect disassembly.
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Experts believe China disassembled the machine in an attempt to bypass the ban on importing new EUV equipment from the US and Europe.
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However, the ultra-sophisticated structure of the photolithography machine makes duplication nearly impossible, even for experienced engineers.
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The system requires sub-nanometer precision, combining a 193 nm ArF laser, a submerged lens, and extremely complex optical calibration.
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A small misalignment can throw off the entire alignment process, something only the original manufacturer can restore.
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Although China has made some strides in chip technology, it is still far behind ASML.
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Currently, domestic models can only produce chips at 65-90 nm, while ASML has advanced to 2 nm technology, continuing to maintain its "dominant" position in the global photolithography industry.
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Source: https://khoahocdoisong.vn/co-may-khien-trung-quoc-dau-nao-suot-6-nam-van-khong-sao-chep-noi-post2149065708.html


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